Mechanically robust hydrophobic fluorine-doped diamond-like carbon film on glass substrate

نویسندگان

چکیده

Development of hydrophobic surfaces with a low friction coefficient is an impressive strategy for improving performance self-cleaning glasses and photovoltaic cells. To this end, diamond-like carbon (DLC) films have been fabricated by plasma-enhanced chemical vapor deposition (PECVD) varying the fluorine concentration film. As introduced to DLC film, some fluorocarbon compounds, including CF CF2 also CF3, are formed as confirmed X-ray photoelectron spectroscopy (XPS). Additionally, Raman analysis revealed decrease in sp3/sp2 hybridization ratio atoms increased films. It believed that presence compounds on surface high roughness key factors responsible hydrophobicity fluorine-doped Nano-scratch nanoindentation tests indicated significant relationship between content mechanical properties The hardness elastic modulus film were decreased increasing With incorporation (19.2 at.%) into 0.2 was obtained. potential moderate robust interface adequate engineering glasses.

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ژورنال

عنوان ژورنال: Diamond and Related Materials

سال: 2023

ISSN: ['1879-0062', '0925-9635']

DOI: https://doi.org/10.1016/j.diamond.2023.110252